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PRINCIPLE OF OPERATION
The Freescale accelerometer is a surface-micromachined
integrated-circuit accelerometer.
The device consists of a surface micromachined
capacitive sensing cell (g-cell) and a signal conditioning ASIC
contained in a single package. The sensing element is sealed
hermetically at the wafer level using a bulk micromachined
cap wafer.
The g-cell is a mechanical structure formed from
semiconductor materials (polysilicon) using semiconductor
processes (masking and etching). It can be modeled as a set
of beams attached to a movable central mass that move
between fixed beams. The movable beams can be deflected
from their rest position by subjecting the system to an
acceleration ( Figure 3 ).
As the beams attached to the central mass move, the
SPECIAL FEATURES
g-Select
The g-Select feature allows for the selection between two
sensitivities. Depending on the logic input placed on pin 10,
the device internal gain will be changed allowing it to function
with a 3g or 9g sensitivity ( Table 3 ). This feature is ideal when
a product has applications requiring two different sensitivities
for optimum performance. The sensitivity can be changed at
anytime during the operation of the product. The g-Select pin
can be left unconnected for applications requiring only a 3g
sensitivity as the device has an internal pull-down to keep it
at that sensitivity (440 mV/g).
Table 3. g-Select Pin Description
distance from them to the fixed beams on one side will
increase by the same amount that the distance to the fixed
beams on the other side decreases. The change in distance
is a measure of acceleration.
g-Select
0
1
g-Range
3g
9g
Sensitivity
440 mV/g
117.5 mV/g
The g-cell beams form two back-to-back capacitors
( Figure 3 ). As the center beam moves with acceleration, the
distance between the beams changes and each capacitor's
value will change, (C = A ε /D). Where A is the area of the
beam, ε is the dielectric constant, and D is the distance
between the beams.
The ASIC uses switched capacitor techniques to measure
the g-cell capacitors and extract the acceleration data from
the difference between the two capacitors. The ASIC also
signal conditions and filters (switched capacitor) the signal,
providing a high level output voltage that is ratiometric and
proportional to acceleration.
Acceleration
Figure 3. Simplified Transducer Physical Model
Sleep Mode
The 2 axis accelerometer provides a Sleep Mode that is
ideal for battery operated products. When Sleep Mode is
active, the device outputs are turned off, providing significant
reduction of operating current. A low input signal on pin 7
(Sleep Mode) will place the device in this mode and reduce
the current to 3 μ A typ. For lower power consumption, it is
recommended to set g-Select to 3g mode. By placing a high
input signal on pin 7, the device will resume to normal mode
of operation.
Filtering
The 2 axis accelerometer contains an onboard single-pole
switched capacitor filter. Because the filter is realized using
switched capacitor techniques, there is no requirement for
external passive components (resistors and capacitors) to set
the cut-off frequency.
Ratiometricity
Ratiometricity simply means the output offset voltage and
sensitivity will scale linearly with applied supply voltage. That
is, as supply voltage is increased, the sensitivity and offset
increase linearly; as supply voltage decreases, offset and
sensitivity decrease linearly. This is a key feature when
interfacing to a microcontroller or an A/D converter because
it provides system level cancellation of supply induced errors
in the analog to digital conversion process.
MMA6341L
Sensors
4
Freescale Semiconductor
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相关代理商/技术参数
MMA6361L
制造商:FREESCALE 制造商全称:Freescale Semiconductor, Inc 功能描述:?±1.5g, ?±6g Two Axis Low-g Micromachined Accelerometer
MMA6361LR1
功能描述:加速计 - 板上安装 1.5 XY LGA 14 LD ENH RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6361LR2
功能描述:加速计 - 板上安装 1.5 XY LGA 14 LD ENH RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6361LT
功能描述:加速计 - 板上安装 1.5G XY LGA 14 LDS ENH RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6519KW
功能描述:加速计 - 板上安装 XY-AXIS 80/ 80G RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6519KWR2
功能描述:加速计 - 板上安装 XY-AXIS 80/ 80G RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6525KW
功能描述:加速计 - 板上安装 XY-AXIS 105/ 105G RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C
MMA6525KWR2
功能描述:加速计 - 板上安装 XY-AXIS 105/ 105G RoHS:否 制造商:Murata 传感轴:Double 加速:12 g 灵敏度: 封装 / 箱体: 输出类型:Analog 数字输出 - 位数:11 bit 电源电压-最大:5.25 V 电源电压-最小:4.75 V 电源电流:4 mA 最大工作温度:+ 125 C 最小工作温度:- 40 C